OCTAFLUOROCYCLOBUTANE

'Octafluorocyclobutane', or 'perfluorocyclobutane', C₄F₈, is a compound of carbon and fluorine.
Its critical point is at 115.3 °C and 2.79 MPa.
Octafluorocyclobutane is a dimer of tetrafluoroethylene.
Octafluorocyclobutane is used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant.
It has also been investigated as a refrigerant in specialised applications, as a replacement for Ozone depleting chlorofluorocarbon refrigerants.