TRICHLOROSILANE

'Properties'

'General'
Name	Trichlorosilane
Chemical formula	HSiCl3
Appearance	Colourless liquid
'Physical'
Molar mass	135.5 g/mol
Melting point	146 K (-127 °C)
Boiling point	305 K (32 °C)
Density	1.34 ×103 kg/m3 (liquid)
Solubility	decomposes in water
'Thermochemistry'
ΔfH0gas	-496.22 kJ/mol
ΔfH0liquid	? kJ/mol
ΔfH0solid	? kJ/mol
S0gas, 1 bar	313.72 J/mol·K
S0liquid, 1 bar	? J/mol·K
S0solid	? J/mol·K
'Safety'
Ingestion	May cause nausea, vomiting, kidney damage.
Inhalation	May cause burning in chest, dizziness, pulmonary edema, cardiac irregularity, kidney damage.
Skin	Possible burns, especially on wet skin.
Eyes	Produces burning and tearing with possible cornea damage.
More info	Hazardous Chemical Database
SI units were used where possible. Unless otherwise stated, standard conditions were used. Disclaimer and references

'Trichlorosilane' is a chemical compound containing silicon, hydrogen, and chlorine. At high temperatures, it decomposes to produce silicon, and as such, purified trichlorosilane is the principal source of ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid. Because of its reactivity and wide availability, it is frequently used in the synthesis of silicon-containing organic compounds.

Contents

Production

Reference

External links

Production

Industrially, trichlorosilane is produced by blowing hydrogen chloride through a bed of silicon powder at 300°C. There, they combine to make trichlorosilane and hydrogen according to the chemical equation
:Si + 3 HCl → HSiCl₃ + H₂
A properly designed reactor can achieve a yield of 80-90% trichlorosilane. The major byproducts are silicon tetrachloride (chemical formula SiCl₄), hexachlorodisilane (Si₂Cl₆), and dichlorosilane (H₂SiCl₂), from which trichlorosilane can be separated by distillation.
The reverse process is used to produce of silicon of higher purity.

Reference

|Semiconductors: Silicon: Substrate Manufacture: Polycrystalline Silicon Production

External links